基于金属氧化物的乙醇检测气敏材料的研究进展

金属氧化物型半导体气体传感器是目前常用的乙醇检测手段，深入研究和改进金属氧化物型半导体材料是提升传感器性能的重要方式。本文首先论述了气敏检测的机理和影响因素，并综述了近年来发展的主要金属氧化物型半导体气敏材料，重点介绍了不同微观结构的Co₃O₄、ZnO、SnO₂及掺杂金属氧化物材料、氧化物异质结等的研究和发展情况，对它们的合成方法、结构特点以及结构与乙醇气敏性能之间的关系进行了探讨。分析表明，减小材料颗粒尺寸、构建大比表面积多孔结构、掺杂和复合改性，是提升金属氧化物材料气敏性能的有效措施。此外，基于传感器微小化的趋势，以微机电系统（MEMS）工艺为基础的微型传感器成为气体传感器的发展趋势。然而，目前针对金属氧化物气敏材料的制备依然缺乏一定的理论指导，气体检测缺乏相应的机理研究，亟需物理、化学、材料等多学科的相互结合，促进乙醇等半导体气体传感器的进一步发展。

Recent advances of ethanol detection materials based on metal oxides

At present, metal oxide semiconductor gas sensor is the most widely studied sensor for ethanol detection. It is an important way to improve the performance of gas sensor by enhancing the response and selectivity of metal oxide. In this paper, the mechanism and influence factors of gas sensing are discussed. The development of main metal oxides for gas sensor in recent years is also reviewed. The investigation and development of different structural Co₃O₄, ZnO, SnO₂ and their metal doped oxide materials, oxide heterojunction are introduced. Especially, the synthesis, structural characteristics and the relationship between the structure and performance are emphasized. The results show that the performance of gas sensor can be greatly improved by decreasing particle size, increasing large specific surface area, constructing multi-dimensional materials, doping materials and forming heterojunctions. In addition, micro-hot-plate sensors based on MEMS process have become the development trend of gas sensors due to the advantages of sensor miniaturization. However, the insufficiency of theoretical guidance limits the development of metal oxides. The integration of the developments from multiple-disciplies of materials, physics, and chemistry will greatly promote the development of gas sensing materials.