| 新型化学气相沉积炉的炉衬 |
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| 引用本文： | 李小杰,段建军,黄剑.新型化学气相沉积炉的炉衬[J].工业加热,2013(6):62-64. |
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| 作者姓名： | 李小杰 段建军 黄剑 |
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| 作者单位： | [1]西安电炉研究所有限公司,陕西西安710061 [2]西安航天复合材料研究所,陕西西安710025 |
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| 摘 要： | 我国在C/C复合材料领域的化学气相沉积电阻炉存在诸多问题,其中在炉衬、电热元件的安装和炭源气体在加热炉内漏气等存在许多隐患;随着国民经济的发展,我国的炉衬耐火材料也得到迅猛发展,结合国内情况,成功研制出新型CVD化学气相沉积炉炉衬结构,该结构能较好的解决以上问题.经过大量高温测试证明,该结构的性能、安装、维护和使用寿命都达到国外先进水平.
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| 关 键 词： | 电阻炉 化学气相沉积炉 炉衬结构 高温测试 |
New Type Furnace Lining for the CVD Furnace |
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| LI Xiaojie,DUAN Jianjun,HUANG Jian.New Type Furnace Lining for the CVD Furnace[J].Industrial Heating,2013(6):62-64. |
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| Authors: | LI Xiaojie DUAN Jianjun HUANG Jian |
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| Affiliation: | 1. Xi＇ an Electric Furnace Institute Co. Ltd., Xi＇ an 710061, China; 2. Xi＇ an Aerospace Composites Research Institute, Xi＇ an 710025, China, China) |
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| Abstract: | There are kinds of problems for the CVD furnace in the field of C/C composite, and especially the hidden dangers are in aspects of furnace lining, installation of heating elements and linkage of carbon source gas in heating furnace etc. With the development of the national economy, the refractory material for furnace lining has grown rapidly in China, and we have successfully developed the new type lining structure for CVD furnace, which has effectively solved the above problems. In addition, we have already had high temperature test, which proved its performance, installation, maintenance and service life have reached the international advanced level. |
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| Keywords: | resistance furnace CVD furnace furnace lining structure high temperature test |
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