直线度误差分离方法的误差分析

本文在研究精密和超精密加工技术的发展对直线度误差分离技术所提出的新要求的基础上，定量分析了传感器初始对准误差、忽略摆角误差和传感器漂移特性差异在时域和频域直线度误差分离方法中造成的误差，同时指出了频域方法中权系数对测量误差的放大作用。

An Analysis of the Accuracy for Straightness Measurement with EST Method

Based on the study of the new requirements of the precision and ultraprecision machining technique for the error separation technique of straightness measurement, this paper analyzed quantitative the error introduced into time domain and frequency domain EST results by the misalignment of sensors, the neglect of yaw angle in sequential two point method and the difference of drifting of these sensors. This paper also described quantitative the magnifying ability for measurement errors of the factors W(k) in frequency domain EST methods. Some measures were taken to diminish these influences. The conclusion that sequential two point method is the best fit method for straightness measurement was arrived at the end of this paper.