掺N类金刚石薄膜的制备及微观结构分析

采用直流磁控溅射法,在光学玻璃衬底上沉积类金刚石(DLC)和掺N类金刚石薄膜(DLC:N)。用喇曼光谱、X射线光电子能谱(XPS)、傅里叶红外光谱(FTIR)等研究分析了所制备薄膜的微观结构。喇曼光谱的结果表明,掺N类金刚石膜仍具有典型的类金刚石膜结构,在类金刚石薄膜中掺N不仅有助于提高膜中sp3/sp2的比例,而且还能阻止sp2键向石墨相的转化,稳定并优化薄膜的类金刚石属性。FTIR表明,薄膜中N与C原子形成了C—N、CN及C≡N等键合方式。XPS谱表明,掺N类金刚石膜中除了C和N元素外,还出现了少量的O元素,而C1s和N1s的解谱显示,掺N后的类金刚石膜中的C、N结合能发生了明显的移动,由计算得出薄膜中N的含量为13.5%。薄膜的表面形貌图(AFM)表明,在类金刚石薄膜中掺N能够改善其表面形貌。

Deposition and Microstructure Analysis of Nitrogen Doped Diamond-Like Carbon Films

Diamond-like carbon (DLC) film and N-doped diamond-like carbon (DLC:N) film were deposited on optical glass by direct current magnetron sputtering. Raman spectroscopy, Fourier transform infrared spectroscopy (FTIR) and X-ray photoelectron spectroscopy (XPS) were used to analyze the microstructures of the DLC : N film. Raman spectra shows that the DLC : N film still has typical structure of DLC films and that introducing N2 into DLC films, it contributes to enhancing the ratio of sp3/sp2 in DLC films, and prevents sp2 from changing to graphite phase. The FTIR spectra reveals that N atoms in the films are found combined with carbon atoms as C-N, C=N and C≡N bonds. XPS spectra shows that a little oxygen exists in the DLC: N film together with visible carbon and nitrogen, and Gaussian fittings curves of C1s and N1s imply that the binding energy of C atoms and N atoms moves obviously, The quantitative calculations reveal that the N content in DLC:N films is 13.5%. The AFM shows that doping N into DLC films helps improving their surfaces.