| Preparation and Characterization of CeO2-TiO2/SnO2：Sb Films Deposited on Glass Substrates by R.F. Sputtering |
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| 作者单位： | Key Laboratory of Silicate Materials Science and Engineering（Wuhan University of Technology）, Ministry of Education, Wuhan University of Technology, Wuhan 430070, China |
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| 基金项目： | 教育部长江学者奖励计划 |
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| 摘 要： |
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| 关 键 词： | 磁控管 红外线 光谱学 电子扫描显微镜 紫外线 吸收作用 |
Preparation and Characterization of CeO2-TiO2/SnO2:Sb Films Deposited on Glass Substrates by R.F.Sputtering |
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| Authors: | ZHAO Qingnan DONG Yuhong NI Jiamiao WANG Peng ZHAO Xiujian |
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| Abstract: | CeO2-TiO2 films and CeO2-TiO2/SnO2:Sb(6 mol%)double films were deposited on glass substrates by radio-frequency magnetron sputtering(R.F.Sputtering),using SnO2:Sb(6 mol%)target,and CeO2-TiO2 targets with different molar ratio of CeO2 to TiO2 (CeO2:TiO2=0:1.0;0.1:0.9;0.2:0.8;0.3:0.7;0.4:0.6;0.5:0.5;0.6:0.4; 0.7:0.3; 0.8:0.2;0.9:0.1;1.0:0).The films are characterized by UV-visible transmission and infrared reflection spectra,scanning electron microscopy(SEM),Raman spectroscopy,X-ray photoelectron spectroscopy(XPS)and X-ray diffraction(XRD),respectively.The obtained results show that the amorphous phases composed of CeO2-TiO2 play an important role in absorbing UV, there are Ce3+,Ce4+ and Ti4+ on the surface of the films;the glass substrates coated with CeO2-TiO2(Ce/Ti=0.5:0.5;0.6:0.4)/SnO2:Sb(6 mol%) double films show high absorbing UV(>99),high visible light transmission(75%)and good infrared reflection films can be used as window glass of buildings,automobile and so on. |
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| Keywords: | coating glass CeO2-TiO2/SnO2 :Sb double thin films absorbing UV IR reflection R F sputterin |
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