Investigation of membrane deformation by a fringe projection method |
| |
Authors: | Wang Shihua Tay Cho Jui Quan Chenggen Shang Huai Min |
| |
Affiliation: | Department of Mechanical Engineering, National University of Singapore, Singapore. mpewsh@nus.edu.sg |
| |
Abstract: | An optical method has been developed to measure the deformation of a membrane in a microphone. A fringe projector that consists of an optical fiber and an optical wedge is described and analyzed by geometric optics. A three-step phase-shifting technique that involves the introduction of an arbitrary phase is discussed. The fine fringe patterns projected onto a small test surface are captured by a CCD camera mounted on a long-distance microscope. With the aid of a phase-shifting technique and signal-demodulating techniques, the proposed setup is capable of measuring deformation of the membrane of the order of as much as submicrometers. |
| |
Keywords: | |
本文献已被 PubMed 等数据库收录! |