Development of method to model surface of reflowed square microlens for image sensor |
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| Authors: | Kim S-M Choi M Kim H Lim J Kang S |
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| Affiliation: | Yonsei Univ., Seoul; |
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| Abstract: | A numerical method to model the surface of a reflowed square micro- lens is proposed to improve the simulation accuracy of photosensitivity for an image sensor. To verify the proposed method, a reflowed square microlens with base size of 4.8 x 4.8 mum and sag height of 1.55 mum was fabricated and the modelling accuracy was compared and analysed. |
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