| Performance Analysis of RF Spiral Inductor with Gradually Changed Metal Width and Space |
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| 引用本文： | Wang Yong,Shi Yanling,Liu Yun,Ding Yanfang,Tang Shenqun,Zhu Jun,Chen Shoumian,and Zhao Yuhang. Performance Analysis of RF Spiral Inductor with Gradually Changed Metal Width and Space[J]. 半导体学报, 2005, 26(9): 1716-1721 |
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| 作者姓名： | Wang Yong Shi Yanling Liu Yun Ding Yanfang Tang Shenqun Zhu Jun Chen Shoumian and Zhao Yuhang |
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| 作者单位： | 华东师范大学信息学院，华东师范大学信息学院，华东师范大学信息学院，华东师范大学信息学院，华东师范大学信息学院，上海集成电路研发中心，上海集成电路研发中心，上海集成电路研发中心 上海200062传感技术联合国家重点实验室，上海200050，上海200062传感技术联合国家重点实验室，上海200050，上海200062，上海200062，上海200062，上海201203，上海201203，上海201203 |
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| 基金项目： | 国家自然科学基金(批准号:60306012)，上海市科委启明星计划(批准号:04QMX1419)，上海市教委优青后备人才计划(批准号03YQHB061)资助项目~~ |
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| 摘 要： | To decrease the metal losses of RF spiral inductor,a novel layout structure with gradually reduced metal line width and space from outside to inside is presented.This gradual changed inductor has less eddy-current effect than the conventional inductor of fixed metal width and space.So the series resistance can be reduced and the quality (Q) factor of the inductor relating to metal losses is increased.The obtained experimental results corroborate the validity of the proposed method.For a 6nH inductor on high-resistivity silicon at 2.46GHz,Q factor of 14.25 is 11.3% higher than the conventional inductor with the same layout size.This inductor can be integrated with radio frequency integrated circuits to gain better performance in RF front end of a wireless communication system.
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| 关 键 词： | RF spiral inductor quality factor eddy-current effect metal losses |
| 文章编号： | 0253-4177（2005）09-1716-06 |
| 收稿时间： | 2005-01-05 |
| 修稿时间： | 2005-04-30 |
Performance Analysis of RF Spiral Inductor with Gradually Changed Metal Width and Space |
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| Wang Yong, Shi Yanling, Liu Yun, Ding Yanfang, Tang Shenqun, Zhu Juna, Chen Shoumiana,Zhao Yuhanga. Performance Analysis of RF Spiral Inductor with Gradually Changed Metal Width and Space[J]. Chinese Journal of Semiconductors, 2005, 26(9): 1716-1721 |
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| Authors: | Wang Yong Shi Yanling Liu Yun Ding Yanfang Tang Shenqun Zhu Juna Chen Shoumiana Zhao Yuhanga |
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| Affiliation: | 1 Departmentof E. E. , EastChina Normal University, Shanghai 200062, China;2 State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Shanghai 200060, China;3 Shanghai IC Research and Development Center, Shanghai 201203, China |
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| Abstract: | To decrease the metal losses of RF spiral inductor,a novel layout structure with gradually reduced metal line width and space from outside to inside is presented.This gradual changed inductor has less eddy-current effect than the conventional inductor of fixed metal width and space.So the series resistance can be reduced and the quality (Q) factor of the inductor relating to metal losses is increased.The obtained experimental results corroborate the validity of the proposed method.For a 6nH inductor on high-resistivity silicon at 2.46GHz,Q factor of 14.25 is 11.3% higher than the conventional inductor with the same layout size.This inductor can be integrated with radio frequency integrated circuits to gain better performance in RF front end of a wireless communication system. |
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| Keywords: | RF spiral inductor quality factor eddy-current effect metal losses |
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