|
|||||
|
|
Surface-acoustic-wave (SAW) voltage sensor with improved sensitivity |
|
| Abstract: | The sensitivity of a surface-acoustic-wave (SAW) voltage sensor can be increased by reducing the thickness of the substrate across which the voltage is applied. Voltage sensitivity of 95 Hz/V has been obtained in a 77-MHz SAW oscillator fabricated on a 71-µm-thick, 728° Y-X LiNbO |
| Keywords: | |