激光衍射测量研究与应用

激光衍射测量的应用多局限于夫琅和费衍射，因为夫琅和费衍射暗斑间距与衍射体尺寸之间具有很简单的函灵关系，而菲涅尔衍射光强分布非常复杂，缺乏解析的计算方法，本文首先从理论上证明，菲涅尔衍射暗斑分布与夫琅和费衍射是相同的，并通过实验数据证实了上述结论。同时，利用上述结论提出了一种新颖的衍射测量方法，能够有效地简化仪器结构，提高测量精度，扩展测量范围。

Application and Study on Laser Diffraction Measurement

As well known, modern laser diffraction has widely used in engineering measurement but it mostly limited in Fraunhofer diffraction because there is simple function between the size to be measured and space of diffraction dark spots and there are no analytic algorithm for Fresnel diffraction. By analyses and experiments it has been proven that the simple function mentioned above can be extended to Fresnel diffraction field with good precise. Moreover a new measurement method based on the result mentioned above is developed that can simple the structure of instrument, increase measurement, extend measurement range.