| 水环式真空泵在直拉单晶炉上的应用 |
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| 引用本文： | 施政.水环式真空泵在直拉单晶炉上的应用[J].半导体技术,2005,30(3):18-19,31. |
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| 作者姓名： | 施政 |
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| 作者单位： | 浙江大学机械厂,杭州,310027 |
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| 摘 要： | 分析了采用滑阀式真空泵直拉单晶炉真空系统的缺点;通过改造真空系统,将水环式真空泵应用在直拉单晶炉设备上,提高了直拉单晶炉的整体性能.
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| 关 键 词： | 直拉单晶炉 真空系统 水环式真空泵 |
| 文章编号： | 1003-353X(2004)03-0018-02 |
Application of Liquid Ring Vacuum Pump in Czochralski Crystal Grower |
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| SHI Zheng.Application of Liquid Ring Vacuum Pump in Czochralski Crystal Grower[J].Semiconductor Technology,2005,30(3):18-19,31. |
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| Authors: | SHI Zheng |
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| Abstract: | The drawback of rotary piston vacuum pump in the vacuum system of Czochralski (CZ) crystal grower is analyzed. Some technical measures to improve the vacuum system are put forward, hence liquid ring vacuum pump is feasible in the CZ crystal grower, which is conducive to good performance of the CZ crystal grower. |
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| Keywords: | Czochralski crystal grower vacuum system liquid ring vacuum pump |
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