带有静电自检测功能的高灵敏度加速度传感器

研究了一种带有自检功能的在平面内自限制压阻式加速度传感器．为实现该加速度传感器，提出了一套新的体硅微机械工艺，使用普通硅片取代SOI硅片来制作器件．传感器采用在深槽侧壁（悬臂梁弯曲的表面）制作压阻的方法，灵敏度比在硅表面上制作压阻的传统器件高近一倍．传感器利用集成在内的静电驱动器，实现电自检测功能．

High Performance Accelerometers with Advanced Bulk Micromachining Technology

An in plane sensitive piezoresistive accelerometer with self test function is proposed.A set of new silicon bulk micromachining process is developed to fabricate the proposed device.With the developed fabrication technique,conventional silicon wafer can be used instead of expensive SOI wafer. This design doubles the sensitivity by putting the piezoresistor on the surface of the vertical sidewall of the cantilevers,compared with conventional design.Electrostatic self test function of the accelerometer is also realized by integrated actuator.