| 微梳齿结构动态特性参量的光学测量与分析(英文) |
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| 引用本文： | 刘海鹏,高世桥,周勇,金磊,何运丽.微梳齿结构动态特性参量的光学测量与分析(英文)[J].纳米技术与精密工程,2014(1):22-26. |
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| 作者姓名： | 刘海鹏 高世桥 周勇 金磊 何运丽 |
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| 作者单位： | [1]北京理工大学爆炸科学与技术国家重点实验室,北京100081 [2]北京理工大学机电学院,北京100081 |
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| 基金项目： | 国家高技术研究发展计划（863计划）资助项目（2013AA041104）. |
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| 摘 要： | 光学测试方法属于非接触测量,目前已经成为MEMS动态测试领域的研究热点.为了实时检测梳齿式微结构驱动模态的谐振特性,由高速摄像机和显微镜组成的计算机微视觉光学测试系统和相关的视频分析软件被用于测量微梳齿结构的动态特性.利用这套微视觉光学测试系统,可以获得微梳齿结构驱动模态的位移响应曲线和幅频特性曲线,并可以进一步得到驱动模态的固有频率、品质因子、阻尼系数等参数.测得的结果与计算结果相比,一致性较好.
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| 关 键 词： | 光学测量 动态特性 微梳齿 高速摄像机 显微镜 |
Optical Measurement and Analysis of Dynamic Characteristics of Micro-Comb Structure |
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| Liu Haipengl,Gao Shiqiao,Zhou Yong,Jin Lei,He Yunli.Optical Measurement and Analysis of Dynamic Characteristics of Micro-Comb Structure[J].Nanotechnology and Precision Engineering,2014(1):22-26. |
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| Authors: | Liu Haipengl Gao Shiqiao Zhou Yong Jin Lei He Yunli |
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| Affiliation: | 2 State Key Laboratory of Explosion Science and Technology, Beijing Institute of Technology, Beijing 100081, China; 2. School of Meehatronical Engineering, Beijing Institute of Technology, Beijing 100081, China) |
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| Abstract: | optlcat test meuuu, dynamic testing field. In order to realtime detect the resonance parameters of driving model, the micro vision optical test system and related video analysis software are used to measure the dynamic characteris tics of microcomb structure. Using this microvision optical test system and software, we can obtain the displacement response curve and amplitudefrequency characteristic curve under driving model. Corre spondingly, some parameters of driving model such as natural frequency, quality factor and damping coef ficient can be further obtained. And the experimental results are in good agreement with those calculated. |
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| Keywords: | optical measurement dynamic characteristics micro-comb high-speed camera microscope |
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