Li2O-A12O3-SiO2微晶玻璃超光滑表面纳米划痕产生机理及抑制实验研究

对Li2O-A12O3-SiO2微晶玻璃超光滑表面进行了纳米划痕实验，测得微晶玻璃超光滑表面弹性一塑性与塑性．脆性转变的临界载荷分别为3．906mN和29．78mN．通过对微晶玻璃超光滑表面划痕产生机理进行分析，得出在纳米尺度的抛光加工过程中，抛光颗粒的载荷越接近弹塑转变临界载荷，则样品表面产生的划痕越少，越易获得无划痕的超光滑表面．通过对比抛光工艺优化前后的实验结果，可以看出优化后的抛光工艺对超光滑表面划痕的抑制效果较明显，证实了上述研究结果的正确性．该研究结果对于Li2O-A12O3-SiO2微晶玻璃超光滑表面加工具有一定的指导意义．

Experimental Study on Generation Mechanism and Suppression of Nano-Scratch on Super Smooth Surface of Glass-Ceramic in Li2O-A12O3-SiO2 System

The critical load values obtained for elasticity-ductility and ductility-brittleness transition of glass-ceramic are 3. 906 mN and 29.78 mN respectively through nano-scratch tests on super smooth sur- face of glass-ceramic in the Li2O-A12O3-SiO2system. Through analyzing mechanism of scratch on super smooth surface of glass-ceramic, it is shown that fewer scratch on the finished surface can he seen when the load of polishing slurry is closer to the critical load of elasticity-ductility transition in the nano-scale polishing process, and the finished surface is smoother. By comparing results before and after optimiza- tion of polishing process, it can be concluded that the suppression effect of the polishing process after op- timization for the scratch on the super smooth surface was more obvious, and the correctness of research conclusion mentioned above was proved. The research conclusion has guiding significance for machining super smooth surface.