| 硅压力传感器的可靠性试验方法及失效分析 |
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| 引用本文： | 齐虹,王蕴辉,易德兴,王善慈. 硅压力传感器的可靠性试验方法及失效分析[J]. 传感器与微系统, 2001, 20(4): 31-33 |
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| 作者姓名： | 齐虹 王蕴辉 易德兴 王善慈 |
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| 作者单位： | 1. 信息产业部电子第四十九研究所,
2. 信息产业部电子第五研究所, |
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| 基金项目： | 电子工业部军品预研项目;B9626333; |
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| 摘 要： | 通过对一种特定结构的硅压力传感器进行动态综合应力寿命试验 ,探讨了硅压力传感器的可靠性实验方法 ;并对失效样品进行了解剖分析 ,研究了它在温度、电压和压力共同作用下的失效机理 ,分析了产品设计、工艺与可靠性的关系 ,提出了相应的改进措施。
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| 关 键 词： | 可靠性 试验方法 失效模式 压力传感器 |
| 文章编号： | 1000-9787(2001)04-0031-03 |
| 修稿时间： | 2000-10-10 |
Reliability test method and failure analysis for silicon pressure transducer |
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| QI Hong,WANG Yun-hui,YI De-xing,WANG Shang-ci. Reliability test method and failure analysis for silicon pressure transducer[J]. Transducer and Microsystem Technology, 2001, 20(4): 31-33 |
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| Authors: | QI Hong WANG Yun-hui YI De-xing WANG Shang-ci |
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| Affiliation: | QI Hong 1,WANG Yun-hui 2,YI De-xing 2,WANG Shang-ci 1 |
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| Abstract: | By the test of comprehensive stress lifespan of silicon pressure transducer with special constructure,the method of reliability test is discussed,and the failure samples are analysed.Its reason of failure under the condition of the action of temperature,voltage and pressure together is studied.In addition,the relation between the design and technique of product and reliability are analysed,the correspending improvement methods are propounded. |
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| Keywords: | reliability test method failure model pressure transducer |
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