New target materials for innovative applications on glass |
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| Authors: | Steven Matthews Anja Blondeel Hilde Delrue |
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| Affiliation: | a Bekaert Advanced Coatings NV, E3-laan 75-79, 9800 Deinze, Belgium
b Codelresearch, Résidence Horlitin 7a, 7750 Mont-De-L'Enclus, Belgium |
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| Abstract: | In the new emerging markets of flat panel display, photovoltaic and optical coating applications, the introduction of cylindrical rotating magnetron technology can accommodate the needs for faster, better and cheaper coating processes. Recent developments of hardware (compact end blocks, etc.) and target materials for rotatable magnetron technology offer a total solution to the innovative thin film applications. |
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| Keywords: | Rotating cylindrical magnetrons Sputter deposition Sputter target manufacturing Thermal spraying Silicon Titanium oxide ITO |
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