| 纳米薄膜的制备技术及其膜厚表征方法进展 |
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| 引用本文： | 徐建,陆敏,朱丽娜,吴立敏.纳米薄膜的制备技术及其膜厚表征方法进展[J].现代仪器,2012,18(3):11-15. |
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| 作者姓名： | 徐建 陆敏 朱丽娜 吴立敏 |
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| 作者单位： | 上海市计量测试技术研究院 上海201203 |
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| 基金项目： | 上海市科委纳米专项，上海市科委标准化专项 |
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| 摘 要： | 纳米薄膜材料是一种新型材料,由于其特殊的结构特点,使其作为功能材料和结构材料都具有良好的发展前景。本文综述当前纳米薄膜的制备技术,并针对这些成膜工艺,概括表征纳米薄膜厚度的常用方法。
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| 关 键 词： | 纳米薄膜 薄膜制备 膜厚测量 |
Progress of preparation techniques and thickness measurements of nano-scale thin films |
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| Xu Jian
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Lu Min
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Zhu Lina
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Wu Limin.Progress of preparation techniques and thickness measurements of nano-scale thin films[J].Modern Instruments,2012,18(3):11-15. |
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| Authors: | Xu Jian Lu Min Zhu Lina Wu Limin |
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| Affiliation: | Xu Jian Lu Min Zhu Lina Wu Limin (Shanghai Institute of Measurement and Testing Technology,Shanghai,201203) |
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| Abstract: | Nano-scale thin film is a new type of material,and it has a wide range of potential applications both as functional materials and as structural materials in the future.The preparation techniques and the thickness measurements of nano-scale thin films are reviewed. |
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| Keywords: | Nano-scale thin film Preparation of thin film Thickness measurements of thin film |
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