In situ wear studies of surface micromachined interfaces subject to controlled loading |
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Authors: | Erin E. Flater Maarten P. de Boer |
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Affiliation: | a Department of Engineering Physics, University of Wisconsin-Madison, Madison, WI 53706, USA b Reliability Physics Department, Sandia National Laboratories, Albuquerque, NM 87185, USA |
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Abstract: | Friction and wear are major limiting factors for the development and commercial implementation of devices fabricated by surface micromachining techniques. These tribological properties are studied using a polycrystalline silicon nanotractor device, which provides abundant, quantitative information about friction and wear at an actual microelectromechanical system (MEMS) interface. This in situ approach to measuring tribological properties of MEMS, combined with high-resolution atomic force microscope (AFM) images of wear tracks, provides insight into the effects of different MEMS surface processing on wear. In particular, monolayer coatings have a significant positive effect, while surface texturing does not strongly affect performance. |
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Keywords: | Microscale wear Microelectromechanical systems (MEMS) reliability Nanotractor Monolayer coatings Polycrystalline silicon Atomic force microscopy (AFM) |
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