| LaNiO3凝胶薄膜微细图形的制备 |
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| 引用本文： | 李大玉,高瑞芳.LaNiO3凝胶薄膜微细图形的制备[J].材料导报,2016,30(Z2):259-261. |
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| 作者姓名： | 李大玉 高瑞芳 |
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| 作者单位： | 扬州大学机械工程学院, 扬州 225127,扬州大学机械工程学院, 扬州 225127 |
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| 基金项目： | 江苏省自然科学基金(BK20150455)；扬州市科学技术计划项目(YZ2015088) |
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| 摘 要： | 采用溶胶-凝胶工艺,以Ni(Ac)_2、La(NO_3)_3为前驱原料,以乙醇和乙二醇甲醚为溶剂,以丙烯酸为稳定剂,乙酰丙酮(AcAc)为化学修饰剂制备了感光性LNO溶胶。通过其溶胶的紫外和红外吸收光谱研究了感光性LNO溶胶的紫外感光机理,并运用溶胶-凝胶直接感光法制备出LNO薄膜的微细图形。
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| 关 键 词： | 镍酸镧薄膜 微细加工 溶胶-凝胶直接感光法 微细图形 |
Preparation of LaNiO3 Thin Films Patterning |
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| LI Dayu and GAO Ruifang.Preparation of LaNiO3 Thin Films Patterning[J].Materials Review,2016,30(Z2):259-261. |
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| Authors: | LI Dayu and GAO Ruifang |
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| Affiliation: | College of Mechanical Engineering, Yangzhou University, Yangzhou 225127 and College of Mechanical Engineering, Yangzhou University, Yangzhou 225127 |
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| Abstract: | The stable LaNiO3 sols were prepared by nickel acetate, lanthanum nitrate as starting materials, the mixed solvents of ethanol and 2-methoxyethanol as solvent, acrylic acid as stabilizer, and acetylacetone (AcAc) as chemical modifier. The UV photosensitive mechanism of LNO/AcAc sols were investigated by ultraviolet and infrared absorption spectroscopy. By this photosensitivity, the fine patterns of LNO gel films can be prepared. |
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| Keywords: | LNO films tiny processing sol-gel direct photosensitive method fine pattern |
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