双晶片压电驱动器的研究

为实现较大的驱动力和速度,提出一种新型压电驱动器,研究了驱动器输出性能随压电泵工作腔数、频率的变化规律。制作驱动器,分别进行十腔串联压电泵/五腔压电泵并联、3~5个压电振子工作、50~400 Hz频率下的输出试验。结果表明,压电泵并联时驱动器的最佳输出功率较大;工作的振子数目不同,存在不同的最佳频率使驱动器的输出速度最大,相同的频率使输出推力最大;最佳频率时,驱动器的输出与工作的振子数目呈正比。在150V、380Hz时驱动器输出功率最大,此时输出速度和推力是10.72mm/s、57.7N。

Study on Bimorph Piezoelectric Actuator

A new type of piezohydraulic actuator is presented in terms of achieving large thrust, high velocity and long traveling distance. The change rule of the output performance with the number of working chamber of piezoelectric pump and the frequency is studied. A actuator is fabricated in this work. The output test in the case of ten cavity series piezoelectric pump/five chamber piezoelectric pump parallel,3~5 piezoelectric vibrator operation and operation at the frequency of 50 400 Hz are carried out respectively. The results show that the output power of the actuator is greater when five chamber piezoelectric pump are paralleled. There are different optimal frequencies for the actuator with different numbers of working oscillators to achieve maximum output speed, while the same frequency makes the output thrust maximum. Under the optimal frequencies, the outputs of actuator are in direct proportion to the operating chamber number. When the voltage is 150 V and the frequency is 380 Hz, the power of actuator is maximum. At this point, the output speed and thrust are 10.72 mm/s,57.7 N respectively.