| 极坐标激光直写径向漂移理论研究 |
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| 引用本文： | 金占雷,谭久彬,刘玉涛,王雷,张山. 极坐标激光直写径向漂移理论研究[J]. 光电工程, 2008, 35(7): 38-43 |
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| 作者姓名： | 金占雷 谭久彬 刘玉涛 王雷 张山 |
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| 作者单位： | 哈尔滨工业大学,超精密光电仪器工程研究所,哈尔滨,150001;哈尔滨工业大学,超精密光电仪器工程研究所,哈尔滨,150001;哈尔滨工业大学,超精密光电仪器工程研究所,哈尔滨,150001;哈尔滨工业大学,超精密光电仪器工程研究所,哈尔滨,150001;哈尔滨工业大学,超精密光电仪器工程研究所,哈尔滨,150001 |
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| 摘 要： | 为了进一步提高光学元件的线条制作精度,建立了极坐标激光直写时线条中心径向漂移的补偿模型.首先推导了极坐标激光直写的曝光量分布模型,分析了径向漂移产生的原因,然后针对数值孔径为0.5 的光刻物镜建立了线条展宽模型和径向漂移模型,并分析了线条展宽和径向漂移的耦合关系,在此基础上分别建立了线条展宽补偿模型和径向漂移补偿模型.仿真结果表明,补偿前的径向漂移量是线条展宽量的3 倍,对径向漂移进行补偿可以很好地减小系统原理误差,提高极坐标激光直写的制作精度.
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| 关 键 词： | 径向漂移 线条展宽 补偿 极坐标激光直写 |
| 收稿时间： | 2007-11-05 |
Radial Drift during Polar Laser Direct Writing |
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| JIN Zhan-lei,TAN Jiu-bin,LIU Yu-tao,WANG Lei,ZHANG Shan. Radial Drift during Polar Laser Direct Writing[J]. Opto-Electronic Engineering, 2008, 35(7): 38-43 |
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| Authors: | JIN Zhan-lei TAN Jiu-bin LIU Yu-tao WANG Lei ZHANG Shan |
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| Affiliation: | JIN Zhan-lei,TAN Jiu-bin,LIU Yu-tao,WANG Lei,ZHANG Shan ( Institute of Ultra-precision Optical & Electronic Instrument Engineering,Harbin Institute of Technology,Harbin 150001,China ) |
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| Abstract: | A model for compensation of radial shift was established to further improve fabrication precision during polar laser direct writing. At first, exposure dose distribution model of polar laser direct writing was established , and the cause of radial shift was analyzed. And then, the linewidth broadening model and radial shift model were established corresponding to object lens with numerical aperture 0.5, and the coupling relationship between linewidth broadening and radial shift was analyzed. Based on the ab... |
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| Keywords: | radial shift line broadening compensation polar laser direct writing |
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