数字图像处理原理在光刻自动对准技术中的应用

本文介绍一种用于DSW投影光刻机的电视扫描同轴对准装置及数字信号处理方法。装置采用电视摄象机作为图像信息传感器,模拟量积分压缩数字量,微处理机精确计算硅片和模版的偏移量并控制工作台作微小调整。该装置已具有刻出1.2μ宽线条所需的±0.3μ对准精度。

Application of Digital Image Processing In Autoalignment Technique of Photolithography

In this paper, a TV camera scanning on-axis autoalignment device and methods of digital image processing used in DSW projection printer are presented.In the device,TV cameras are used as image sensors, analogy signal is integrated to compress amout of digital, microprocessor is used to compute deviation between wafer and mask, and control stepping stage to adjust accurately。The device provides ±0.3μ(3) alignment accuracy for 1.2μ resolution。