高精度永磁直线同步伺服系统鲁棒位置控制器的设计

介绍了高精度、微进给永磁直线交流同步电机（PMLSM）驱动系统鲁棒位置控制器的设计，首先，在空载情况下，由静态实验获得非线性摩擦系数模型，通过前馈摩擦补偿器补偿非线性摩擦，其次，由递推最小二乘估计器RLS和负载扰动力观测器构成的估计器，用它来估计动子质量，粘滞摩擦系数和负载扰动力，设计积分－比例IP位置控制器以满足跟踪指令和抑制扰动，将观测的负载扰动力前馈，进一步增强系统的鲁棒性。

Robust position controller design for high-precision permanent magnet linear synchronous motor

This paper presents a robust position controller for a high precision micro feed permanent magnet linear synchronous motro (PMLSM) servo system. First, the nonlinear friction factor model is achived through a stationary experiment, the friction compensator is fed forward to compensate nonlinear friction. Then, the mover mass, viscous friction factor and disturbance force are estimated by the proposed estimator, which is composed of a recursive least square (RLS) estimator and a disturbance observer. And then IP position controller is designed to match tracking specifications and suppress disturbance. Finally, the observed disturbance force is fed forward, so as to increase the robustness of PMLSM drive system.