只读式超分辨光盘的膜层设计和分析

超分辨技术是一种无需减小记录波长或增大数值孔径而提高存储密度的方法。Ge Sb Te是一种良好的相变光存储材料 ,在超分辨光盘中可作为掩膜。利用多层膜反射率的矩阵法计算了掩膜为Ge2 Sb2 Te5薄膜的超分辨只读式光盘的光学参数与各膜层厚度之间的关系 ,最后得到了较为理想的膜层厚度匹配。采用磁控溅射法制备了只读式超分辨光盘 ,测量了光盘的光学性质。

Calculation and Analysis of Multilayers for the Read-only Super-resolution Optical Disks

Super resolution, which allows the readout of information beyond the optical cutoff frequency given by 2NA/λ, is an alternate way to increase the recording density without the need to directly reduce the spot size by increasing NA and reducing λ. Ge-Sb-Te is a kind of phase-change optical recording material with good performance. It may used to be mask layer in the super-resolution optical disks. In this paper, the relation of the optical parameters (reflectivity and R m/R c) and the film thickness of the structure of the multi-layers of read-only super-resolution optical disks were studied with method of eigenmatrix of multi-layer films. The ideal result of thickness for each layer is given. The read-only super-resolution optical disks were fabricated by RF magnetron sputtering technology. The optical properties were measured.