| 金属离子掺杂的TiO_2-SiO_2增透膜的制备及性能 |
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| 引用本文： | 郑娜,康浩,郭庆磊,潘静,胡晓云.金属离子掺杂的TiO_2-SiO_2增透膜的制备及性能[J].电子元件与材料,2010,29(9). |
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| 作者姓名： | 郑娜 康浩 郭庆磊 潘静 胡晓云 |
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| 作者单位： | 西北大学,物理学系,陕西,西安,710069 |
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| 基金项目： | 国家大学生创新性实验计划资助项目，西北大学校级大学生创新实验计划资助项目，西北大学研究生交叉学科资助项目，国家自然科学基金资助项目 |
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| 摘 要： | 为了得到高增透的TiO2-SiO2薄膜,采用sol-gel法制备了金属离子掺杂的TiO2-SiO2薄膜,并对其透射光谱和薄膜厚度进行了表征,研究了退火温度及不同金属离子掺杂(Al3+、Fe3+和Zn2+)对TiO2-SiO2薄膜增透性能的影响。结果表明:Al3+、Fe3+可提高薄膜在可见光波段的增透性,其中,掺杂Al3+的摩尔分数为0.4%的薄膜,未经退火处理的增透性能最佳(透射率可达98%)。掺杂Fe3+使薄膜的截止波长红移量最大,约为14nm。
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| 关 键 词： | 增透膜 sol-gel法 金属离子掺杂 TiO2-SiO2薄膜 |
Preparation and property of metal ion doped TiO2-SiO2 antireflective coating |
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| ZHENG Na,KANG Hao,GUO Qinglei,PAN Jing,HU Xiaoyun.Preparation and property of metal ion doped TiO2-SiO2 antireflective coating[J].Electronic Components & Materials,2010,29(9). |
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| Authors: | ZHENG Na KANG Hao GUO Qinglei PAN Jing HU Xiaoyun |
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| Affiliation: | ZHENG Na,KANG Hao,GUO Qinglei,PAN Jing,HU Xiaoyun(Department of Physics,Northwest University,Xi'an 710069,China) |
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| Abstract: | In order to gain a kind of high antireflective(AR) coating,metal ion doped TiO2-SiO2 thin films were prepared by the sol-gel method.The transmissive spectra and thickness of obtained AR coating were characterized.And the effects of annealing temperature and different metal ion doping(Al3+,Fe3+ and Zn2+) on the antireflective properties of prepared TiO2-SiO2 thin films were studied.The results indicate that the transmissivity of AR coating at the band of visible light is improved by doping Al3+ and Fe3+ ions... |
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| Keywords: | AR coating sol-gel method metal ion doping TiO2-SiO2 thin film |
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