| 氮化铁梯度薄膜的制备和磁性研究 |
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| 引用本文： | 林川,姜恩永,孙多春,田民波.氮化铁梯度薄膜的制备和磁性研究[J].真空科学与技术学报,1996(1). |
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| 作者姓名： | 林川 姜恩永 孙多春 田民波 |
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| 作者单位： | 天津大学应用物理学系!天津300072(林川，姜恩永)，清华大学材料科学与工程系!北京100084(孙多春，田民波) |
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| 基金项目： | 1993～1995年国家自然科学基金 |
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| 摘 要： | 用对向靶溅射方法制备出氮化铁梯度薄膜。利用X射线光电子能谱（XPS）对样品进行了深度剖面分析：铁原子和氮原子的百分含量沿膜厚方向呈梯度变化。X射线衍射表明膜中含有α－Fe，α”－Fe16N2，ε－FexN（2＜x≤3）和ξ-FeN各相。随着氮分压增加，膜中含氮量高的相比例亦增加，饱和磁通密度逐渐降低。
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| 关 键 词： | 对向靶溅射 氮化铁薄膜 梯度薄膜 |
PREPARATION AND MAGNETIC PROPERTIES OF IRON NITRIDES GRADIENT FILM |
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| Lin Chuan,Jiang Enyong.PREPARATION AND MAGNETIC PROPERTIES OF IRON NITRIDES GRADIENT FILM[J].JOurnal of Vacuum Science and Technology,1996(1). |
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| Authors: | Lin Chuan Jiang Enyong |
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| Abstract: | The iron nitrides gradient films were prepared by facing target supttering(FTS). X-ray photoelectron spectroscopy (XPS) was employed for profile analysis and the results showed that Fe and N concen tration changed gradually through the whole thickness of the films- lt was confirmed by X-ray diffraction(XRD) patterns that there were a-Fe, a"-Fe,,N,, E-Fe.N (2
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| Keywords: | Facing-target sputtering Iron nitrides film Gradient film |
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