On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film |
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| Authors: | Zilong Zhang Wen Zhao Guo Chen Masaya Toda Satoshi Koizumi Yasuo Koide Meiyong Liao |
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| Affiliation: | 1. Research Center for Functional Materials, National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba, Ibaraki, 3050044 Japan;2. Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal, 23955 Saudi Arabia;3. Graduate School of Engineering, Tohoku University, Sendai, Miyagi, 9808579 Japan |
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| Abstract: | Electrically integrable, high-sensitivity, and high-reliability magnetic sensors are not yet realized at high temperatures (500 °C). In this study, an integrated on-chip single-crystal diamond (SCD) micro-electromechanical system (MEMS) magnetic transducer is demonstrated by coupling SCD with a large magnetostrictive FeGa film. The FeGa film is multifunctionalized to actuate the resonator, self-sense the external magnetic field, and electrically readout the resonance signal. The on-chip SCD MEMS transducer shows a high sensitivity of 3.2 Hz mT?1 from room temperature to 500 °C and a low noise level of 9.45 nT Hz?1/2 up to 300 °C. The minimum fluctuation of the resonance frequency is 1.9 × 10?6 at room temperature and 2.3 × 10?6 at 300 °C. An SCD MEMS resonator array with parallel electric readout is subsequently achieved, thus providing a basis for the development of magnetic image sensors. The present study facilitates the development of highly integrated on-chip MEMS resonator transducers with high performance and high thermal stability. |
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| Keywords: | magnetic sensors MEMS on-chip actuation and sensing single-crystal diamonds |
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