一种微机械光开关的分析和设计

对悬臂梁微机械光开关的机电特性进行了理论分析 .利用机械和电学特性 ,导出了悬臂梁的弯曲量和所加的电压的解析关系 ,并给出了阈值电压的计算公式 .指出外加电压与梁的宽度无关 ,与梁的长度的平方成反比 .悬臂梁尖端的弯曲量不能超出相邻电极间距的 1/ 3.这些结论是悬臂梁微机械光开关设计和研制的直接依据

Analysis and Design for a Micro-Mechanical Optical Switch

The mechanical and electric characteristics of a cantilever beam micro opto mechanical switch are studied theoretically,with which the dependence of the flexion on the applied voltage is derived,as well as the formula of the threshold voltage.The applied voltage,having no connection with the width of the beam,is in inverse proportion to the square of the beam's length.The deflection at the beam's tip cannot exceed 1/3 of the distance between two adjacent electrodes.These results are the basis of the switch design and development.