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Increase of the Surface Mobility of Carbon Molecular Crystals (CMCs) Using the PECVD Technique
Authors:A Salar Elahi  M Ghoranneviss
Affiliation:1.Plasma Physics Research Center, Science and Research Branch,Islamic Azad University,Tehran,Iran
Abstract:Large-area boron doped multi-layer carbon is synthesized by the plasma enhanced chemical vapour deposition (PECVD) using boron oxide powder and ethanol vapor. We have reviewed the carbon molecular crystals preparation by the PECVD method. The three main synthesis methods of carbon nanocrystals (CNCs) are the arc discharge, the laser ablation and the chemical vapour deposition with a special regard to the later one. By two different methods, ZnO layers were coated on the tubes. RF sputtering was one of the ways to directly deposit ZnO thin layer on the MWCNCs. On the other hand, we used thermally physical vapour deposition for making thin Zn film to oxidize it later. Scanning electron microscopy and also Raman spectroscopy measurements of the prepared samples confirmed the presence of ZnO nanolayers on the CNC bodies.
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