Li-Cu共掺杂ZnO纳米薄膜的溶胶凝胶法制备

采用溶胶-凝胶法,通过调整氯化锂和氯化铜的摩尔比在不同基片上制备了不同Li-Cu共掺杂浓度的ZnO薄膜.利用X射线衍射仪、扫描电子显微镜、透射电子显微镜、紫外可见光分光光度计和伏安特性测试等表征了薄膜的结晶状况、表面形貌及光电特性.结果表明:所得Li-Cu共掺杂ZnO薄膜为六角纤锌矿多晶结构,有CuO杂质相生成.随Li和Cu摩尔比增加,共掺杂ZnO薄膜结晶度增强,晶粒长大,样品表面不平整度增加.CuO颗粒的出现,使得共掺杂ZnO薄膜透射率降低,透光性较差.Li与Cu摩尔比为1∶1时,共掺杂ZnO薄膜的综合导电性最好.

Preparation and characterization of Li-Cu co-doped ZnO thin films by sol-gel method

Li-Cu codoped ZnO thin films were fabricated on various substrates with different molar ratios between the copper chloride and lithium chloride by sol-gel method.The samples were characterized by X-ray diffraction,scanning electron microscopy,transmission electron microscopy,ultraviolet-visible spectrophotometer and current-voltage measurements,respectively.Effects of Li-Cu codoping on the microstructure,surface morphology and photoelectrical properties of the ZnO thin films are systematically investigated.The ZnO thin films show typical hexagonal wurtzite structure with some CuO phase.With increase of doping molar ratio between Cu and Li,the sample crystallinity gets better and the grains grow up gradually.The Li-Cu codoped ZnO thin films show low visible light transmittance as resulted from the formation of CuO grains.When the doping molar ratio between Cu and Li is 1:1,the sample shows the best conductivity.