| 低气压气体放电电子束淀积类金刚石薄膜的光学特性 |
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| 引用本文： | 岁宗南. 低气压气体放电电子束淀积类金刚石薄膜的光学特性[J]. 传感技术学报, 1994, 7(4): 13-17 |
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| 作者姓名： | 岁宗南 |
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| 作者单位： | 东南大学电子工程系!南京，210096 |
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| 摘 要： | 介绍一种新的淀积DLC膜的方法,并详细研究了该膜的光学特性.结果表明它对紫外辐射的透射率很低,但在可见与红外区则是透明的,同时CH_4的流量与基底温度对膜的特性有重要影响.
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| 关 键 词： | 金刚石薄膜 光学特性 电子束淀积 气体放电 |
Optical Characteristics of The DLC Film Perpared by Electron Beam Discharge in Soft Vacuum |
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| Luo Zongnan. Optical Characteristics of The DLC Film Perpared by Electron Beam Discharge in Soft Vacuum[J]. Journal of Transduction Technology, 1994, 7(4): 13-17 |
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| Authors: | Luo Zongnan |
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| Affiliation: | Dpt. of Electronic Engineering .Southeast Univ. |
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| Abstract: | The new method for preparing diamond-like carbon(DLC) film is introduced.Optical characteristics of the DLC film have been discussed in detail also. Results showthat DLC film is untransparent for ultra violet radiation,but for visible and infrared it isransparent,flow of CH4 and substrate temperature have obviously influence on charac-teristics of the film |
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| Keywords: | diamond-like carbon film ring-shaped elecron gun plasma |
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