| MEMS微电容式传感器的传感特性研究 |
| |
| 引用本文： | 王庆敏,杨要恩,苏木标,刘玉红.MEMS微电容式传感器的传感特性研究[J].传感技术学报,2009,22(10). |
| |
| 作者姓名： | 王庆敏 杨要恩 苏木标 刘玉红 |
| |
| 作者单位： | 1. 石家庄铁道学院,河北省大型结构健康诊断与控制重点实验室,石家庄050043
2. 石家庄铁路工程职业技术学院机电系,石家庄,050041 |
| |
| 基金项目： | 铁道部攻关项目资助，河北省攻关项目资助 |
| |
| 摘 要： | 针对传统的传感器无法进行长期健康监测的不足,研发出一套新型的基于MEMS的硅微电容式传感器.对所研制的MEMS传感器的静态传感特性和动态特性进行了理论分析和对比实验研究.结果表明:MEMS硅微电容式传感器在反复加卸载实验中,线性拟和度均在0.999%F.S以上,灵敏度系数为6.9840με/kN,其重复性误差为1.43%F.S;其动态传感特性与传统的加速度计吻合的很好.
|
| 关 键 词： | MEMS传感器 静态传感特性 动态传感特性 线性度 灵敏度 |
Study on Sensing Characteristics of Micro Capacitive Sensor Based on MEMS |
| |
| WANG Qingmin,YANG Yaoen,SU Mubiao,LIU Yuhong.Study on Sensing Characteristics of Micro Capacitive Sensor Based on MEMS[J].Journal of Transduction Technology,2009,22(10). |
| |
| Authors: | WANG Qingmin YANG Yaoen SU Mubiao LIU Yuhong |
| |
| Affiliation: | WANG Qingmin1,YANG Yaoen2,SU Mubiao1,LIU Yuhong11.Structural Health Monitoring , Control Institute,Shijiazhuang Railway Institute,Shijiazhuang 050043,China,2.Shijiazhuang Institute of Railway Engineering,Shijiazhuang 050041 |
| |
| Abstract: | Aim at the disadvantage of traditional sensor for structural health monitoring for long, a new type of micro capacitive sensor based on MEMS is developed. The static and dynamic sensing characteristics are analyzed in theory and in compared experiment. The results show that the linearity is above 0.999%F.S under loading-unloading cycles, the sensitivity is 6.9840 and the repeatability is 1.43%F.S; the dynamic sensing characters is as well as traditional accelerometer. |
| |
| Keywords: | MEMS sensor static sensing characteristics dynamic sensing characteristics linearity sensitivity |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
| 点击此处可从《传感技术学报》浏览原始摘要信息 |
|
点击此处可从《传感技术学报》下载全文 |
|
