Effect of excess PbO on microstructure and orientation of PZT(60/40) films |
| |
Authors: | Chee-Sung Park Jae-Wung Lee Sung-Mi Lee Shin-Hee Jun Hyoun-Ee Kim |
| |
Affiliation: | (1) Department of Materials Science and Engineering and Research Institute of Advanced Materials (RIAM), Seoul National University, Seoul, 151-744, Korea; |
| |
Abstract: | Lead zirconate titanate PZT(60/40)] films were deposited by RF-magnetron sputtering using single oxide targets with various
levels of excess PbO. The excess PbO in the film played an important role in the pyrochlore-to-perovskite transformation,
nucleation and growth processes, orientation control, and crack formation. When 5% or 20% excess PbO was added to the target,
pyrochlore phases were created and the films were severely cracked. However, the films had a perovskite structure without
any pyrochlore phases when 10% or 15% excess PbO was added to the targets. More interestingly, the crystallographic orientation
was strongly dependant on the excess PbO content. A film with a (111) preferred orientation was produced when 10% excess PbO
was added to the target. On the other hand, a film with a (100) preferred orientation was deposited by the target with 15%
excess PbO. The dielectric, ferroelectric and piezoelectric properties of these films with different orientations and microstructures
were examined and correlated with the film structure. |
| |
Keywords: | |
本文献已被 SpringerLink 等数据库收录! |
|