| 基于辐射功率的微热板测温系统设计 |
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| 引用本文： | 漆奇,张彤,刘丽,刘奎学,徐宝琨.基于辐射功率的微热板测温系统设计[J].吉林大学学报(工学版),2008,38(4):936-939. |
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| 作者姓名： | 漆奇 张彤 刘丽 刘奎学 徐宝琨 |
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| 作者单位： | 1. 吉林大学,集成光电子学国家重点联合实验室,长春,130012;吉林大学,电子科学与工程学院,长春,130012
2. 吉林大学,集成光电子学国家重点联合实验室,长春,130012;吉林大学,电子科学与工程学院,长春,130012;吉林大学,物理学院,长春,130012 |
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| 基金项目： | 国家自然科学基金
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吉林省科技厅科研项目 |
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| 摘 要： | 为了解决微小芯片表面测温的难题,设计了一种非接触式微区测温系统。首先利用光纤探头和光功率计测量微热板的辐射功率,再结合辐射功率与温度的关系,精确地测出微热板表面50μm×50μm区域内的温度。实验测试结果与利用有限元分析软件Ansys得到的模拟结果基本一致,并且更换不同口径的光纤探头可以满足不同面积的样品的测量要求。
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| 关 键 词： | 半导体技术 微热板 温度 辐射功率 光功率计 光纤探头 |
| 收稿时间： | 2007-03-16 |
| 修稿时间： | 2007-08-22 |
Micro-hotplate temperature measurement system based on radiation power |
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| QI Qi,ZHANG Tong,LIU Li,LIU Kui-xue,XU Bao-kun.Micro-hotplate temperature measurement system based on radiation power[J].Journal of Jilin University:Eng and Technol Ed,2008,38(4):936-939. |
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| Authors: | QI Qi ZHANG Tong LIU Li LIU Kui-xue XU Bao-kun |
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| Affiliation: | 1.State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130012, China; 2.College of Electronic Science and Engineering, Jilin University, Changchun 130012, China; 3.College of Physics, Jilin University, Changchun 130012, China |
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| Abstract: | An uncontacted temperature measurement system was developed to deal with the problem of the tiny chip surface temperature measurement.The radiation power from the micro-hotplate was measured by a tiny optical fiber probe and an optical power meter.The Si-chip with the similar surface physical character as the micro-hotplate was chosen to calibrate the radiation power against the temperature.By comparing the measured radiation power with the calibration curve,the temperature of the micro-hotplate surface in ... |
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| Keywords: | semiconductor micro-hotplate temperature radiation power optical power meter optical fiber probe |
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