无源电悬浮原理及其实验研究

人们在研究微电机的过程中发现：转子与基底和轴承的摩擦已构成严重影响其运转动态性能的瓶颈障碍，它的转速和寿命远未达到理论值，用电悬浮轴承替代机械轴承不适为一种可选方案，本文对无源电悬浮的稳定平衡条件进行了论证，并作了悬浮过程的动力学模拟，选择直径为３ｍｍ，厚为０．２ｍｍ的玻璃片做悬浮的宏观模拟实验，在仔细调谐电路之后，悬浮物获得六个自由度（ｘ，ｙ，ｚ，θ，ψ）上的鲁棒稳定，进而论证了电悬浮在微机械中应用的可行性。

The Theoretical and Experimental Study of Electric Suspension

It is illustrated in manufacturing micromotor that the contact friction between rotor and substrate or axial is a major hurdle in the instability of rotor. The rotation rate and lofetime are far away from the theoretical value. It is a good manner of replacing the mechanical bearing by electric suspension. In this paper, we present the stable equilibrium condition of electrostatic suspension and simulate the dynamics process of levitation. We have also experimentally demonstrated the robustness and practicality of the electrostatic suspension in micromotors:a 3cm diameter and 0. 2mm thick glass plate was levitated from rest and held stably after tuning the circuits.