超精密车床伺服进给机构设计研究

在分析影响超精密金刚石车床伺服进给机构运动精度的误差源的基础上,不采取提高机床部件制造精度的办法,而从伺服进给机构的机械结构上提出消除这些误差的措施.这些措施主要包括:利用闭合的复合节流方式的气体静压导轨结构与在丝杠与工作台联接之间安装浮动单元.经过实践证明这些措施是有效的,使自研的超精密车床的伺服进给机构运动精度完全达到超精密加工的需求.

Design of servo-feed mechanism of ultra-precise lathe

The paper analyses the error sources which contribute to the kinematic accuracy of servo-feed mechanism of ultra-precise lathe. On the basis of this, this paper brings on some methods for eliminating the error source by modifying machine structure of the servo-feed mechanism instead of increasing the manufacturing accuracy of the lathe′s components. Those methods mainly inlcude applying multi-throttle air-lubricated hydrostatic slide guide and mounting a float unit on the screw pair. After applying those methods to the servo-feed mechanism of the ultra-precise lathe, the kinematic accuracy of the servo-feed mechanism can meet the requirements of ultra-precise Machining.