| 基于PLC网络通信的喷射腐蚀机控制系统的研究 |
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| 引用本文： | 马宁强,张琦,赵涛.基于PLC网络通信的喷射腐蚀机控制系统的研究[J].化工自动化及仪表,2013(8):1025-1028. |
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| 作者姓名： | 马宁强 张琦 赵涛 |
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| 作者单位： | 西安电力电子技术研究所,西安710061 |
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| 摘 要： | 介绍了功率半导体工艺设备——喷射腐蚀机的控制系统构成,应用PLC网络通信理论,给出了网络拓扑图,构建了基于MPI和Profibus总线的多网络混合型网络系统,通过创建链接和编制网络通信程序,实现了对高精度喷射腐蚀机的自动控制,满足了功率半导体器件对厚硅、厚铝刻蚀的各项特殊功能需要.
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| 关 键 词： | 功率半导体器件 喷射腐蚀机 MPI网络 Profibus-DP通信 |
Study of Spray Etcher Control System Based on PLC Network Communication |
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| MA Ning-qiang,ZHANG Qi,ZHAO Tao.Study of Spray Etcher Control System Based on PLC Network Communication[J].Control and Instruments In Chemical Industry,2013(8):1025-1028. |
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| Authors: | MA Ning-qiang ZHANG Qi ZHAO Tao |
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| Affiliation: | ( Xi＇ an Power Electronics Research Institute,Xi＇ an 710061 , China ) |
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| Abstract: | The spray etcher control system for power semiconductor etching process was introduced;and the network topology map was presented to construct multi-network system based on MPI and Profibus and PLC network communication theory.Through creating links and network communication programming,the auto-control of high-precision spray etcher can be implemented to satisfy power semiconductor in Si/AL layer-etching process. |
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| Keywords: | power semiconductor spray etcher MPI network Profibus-DP communication |
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