| 十二工位超洁净全自动超声波清洗机设计、研制与应用 |
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| 引用本文： | 李智峰,施旗,汪兴,周程,敬亚. 十二工位超洁净全自动超声波清洗机设计、研制与应用[J]. 清洗世界, 2011, 27(8): 22-27,31 |
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| 作者姓名： | 李智峰 施旗 汪兴 周程 敬亚 |
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| 作者单位： | 长沙矿冶研究院湖南金能自动化设备有限公司,湖南长沙,410012 |
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| 摘 要： | 论述了一种新型全自动超声波清洗机的的工作原理及实际应用。该清洗机综合运用了当今国际最前沿最先进的清洗理念及技术，清洗后产品的洁净度可达0．25μm。本设备是铬版制作中掩膜抛光后的高洁净度的清洗设备。该产品可以应用于同行业不同的工序或其他行业要求高精度清洗工序中。
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| 关 键 词： | 超洁净 超声波 全自动 慢提拉干燥 全自动化生产 |
Design,research and application of twelve workstation ultra clean automatic ultrasonic cleaning machine |
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| LI Zhifeng,SHI Qi,WANG Xing,ZHOU Cheng,JING Ya. Design,research and application of twelve workstation ultra clean automatic ultrasonic cleaning machine[J]. Cleaning World, 2011, 27(8): 22-27,31 |
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| Authors: | LI Zhifeng SHI Qi WANG Xing ZHOU Cheng JING Ya |
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| Affiliation: | LI Zhifeng,SHI Qi,WANG Xing,ZHOU Cheng,JING Ya(Changsha Mining and Metallurgy Institute,Hunan Kenon Automation Equipment Co.,Ltd.,Changsha,Hunan 410012 China) |
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| Abstract: | This paper discusses a new automatic ultrasonic cleaning machine of the working principle and practical application. This washer comprehensive use of the current international forefront most advanced clean idea and technical. This equipment is applied to maskblank in making mask after polishing precisely cleaning, after cleaning product cleanliness can reach 0.25 μm. This product can be used in the same profession different processes or other industries high-precision cleaning process. |
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| Keywords: | ultra clean ultrasonic full automatic slow tiras dry full automatic production |
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