| STM探针电化学腐蚀装置的设计及实验研究 |
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| 引用本文： | 潘金福,黄旭,王云,丁召.STM探针电化学腐蚀装置的设计及实验研究[J].现代机械,2008(5). |
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| 作者姓名： | 潘金福 黄旭 王云 丁召 |
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| 作者单位： | 贵州大学电子科学与信息技术学院,贵州,贵阳,550025;贵州省微纳电子与软件技术重点实验室,贵州,贵阳,550025 |
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| 基金项目： | 贵州省留学人员科技项目，贵州大学研究生创新基金 |
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| 摘 要： | 本文根据扫描隧道显微镜(STM)探针电化学腐蚀方法的特点,在总结其它STM探针电化学腐蚀装置的基础上,自制了STM探针电化学腐蚀装置。并用此装置进行探针制备的实验研究,摸索出了此装置制备高质量钨探针的较佳工艺条件,同时给出了所制探针的STM成像结果。
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| 关 键 词： | 扫描隧道 显微镜(STM) 探针制备 电化学腐蚀装置 |
Design and Experimental Researches of Electrochemical Device for STM Tips |
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| PAN Jinfu,HUANG Xu,WANG Yun,DING Zhao.Design and Experimental Researches of Electrochemical Device for STM Tips[J].Modern Machinery,2008(5). |
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| Authors: | PAN Jinfu HUANG Xu WANG Yun DING Zhao |
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| Abstract: | Based on operation features of preparation of Scanning tunnel microscopy(STM) tips using electrochemical technique and other electrochemical etching devices for STM tips,a new electrochemical etching device for STM tips is designed.It is used for experimental researches for preparation of STM tips,a relatively good technical condition for preparation of high quality tungsten tips is obtained in experiments,and the SEM imaging of the tip by such device is shown in this paper. |
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| Keywords: | scanning tunnel microscopy tip preparation electrochemical etching device |
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