Estimation of anisotropic properties of nano-structured arrays by modal vibration control at microscale

Nano-structured arrays are engineered to meet the requirements of a variety of applications such as microfilters, sensors, and structural interface due to their unique mechanical characteristics, which cannot be achieved by conventional solid materials. However, it is hard to evaluate the elastic properties of nano-structured arrays owing to the discrete structure, sample size, and availability of suitable techniques. To facilitate this, we develop an advanced three-dimensional microscale vibration testing process. In the test, a specially designed three-dimensional microspecimen with tuned mass is excited by a piezoelectric actuator, and the resonance frequencies are detected by a laser device successfully. The anisotropic elastic moduli of nano-structured array composed of helical nano-springs are identified from a single spectrum. This array shows so strong characteristic anisotropy that the solid one hardly can attain. The microscale testing technique can be extended to other materials and microstructures.