微机电系统(MEMS)的研究进展 |
| |
引用本文: | 孙道恒,王明亮,郑剑铭,张玉德.微机电系统(MEMS)的研究进展[J].机电技术,2003(Z1). |
| |
作者姓名: | 孙道恒 王明亮 郑剑铭 张玉德 |
| |
作者单位: | 厦门大学机电工程系
(孙道恒,王明亮,郑剑铭),厦门大学机电工程系(张玉德) |
| |
摘 要: | 一、MEMS的发展概况 1. 微机电系统的定义 美国:MicroEletroMechanical Systems (MEMS), are integrated micro-devices or systems combining electrical and mechanical components, fabricated using integrated circuit (IC) compatible batch-processing techniques, and varying in size from micrometers to millimeters. These systems merge computation with sensing and actuation to change the way we perceive and control the physical world. 日本:Micromachines are composed of functional elements only a few …
|
本文献已被 CNKI 等数据库收录! |
|