全方位精密微小型移动机器人的运动分析

采用压电陶瓷作为微驱动元件，设计了一种尺寸为50 mm×50 mm×10 mm，基于尺蠖蠕动原理工作的新型全方位精密微小型移动机器人，以其作为负载平台，用于精密操作过程中对微小元件的搬运、操作、精密定位等.在介绍尺蠖蠕动工作原理的基础上，对机器人的运动特性进行了分析，建立了机器人全方位运动模型.对机器人进行了分辨率、定位精度以及全方位运动等的实验研究，实验结果表明，该机器人负载能力约为750 g，最大工作频率可达40 Hz，运动速度可达208 μm/s，运动分辨率可达50 nm，开环直线定位偏离率约为5％；在采用了逐次逼近法进行误差补偿和显微视觉实现闭环控制后，定位精度可达100 nm，可以作为一种通用的高精密移动定位平台，在机器人上集成多种精密微操作器件后，可完成多种微作业任务.

Kinematics analysis of omni-directional precise miniature mobile robot

Using piezoelectric ceramic stacks(PZT) as micro driving elements,a omni-directional precise miniature mobile robot based on the inch-worm driving principle was designed.It could be used as a loading platform for micro components' carry,manipulation,precise position,and so on during the procedure of precise manipulation.After introduced the inch-worm driving principle was introduced,kinematical characteristics of the miniature robot were analyzed,and then omni-directional mobile model set up.Characteristics such as resolution,positioning precision,omni-directional motion and so on of the robot were all tested.Experimental results proved that the robot maximum load was about 750 g,the maximum working frequency was about 40 Hz,the maximum velocity was about,the resolution was about 50 nm.In the open loop straight-line test,the deviating rate was about 5%. In order to reduce the positioning error,successive approximation approach method and closed loop based on microscope vision were adopted,which can enhance the positioning precision to 100 nm.The miniature robot can be used as a common miniature platform with characteristic of high precise mobile capability.When different kinds of micro manipulators are integrated on the robot,it can accomplish many types of micro operation tasks.