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双PSD实现长直导轨四自由度测量的新方法
引用本文:宋庆,王红平,柳长青. 双PSD实现长直导轨四自由度测量的新方法[J]. 工具技术, 2014, 0(3): 86-89
作者姓名:宋庆  王红平  柳长青
作者单位:长春理工大学;
摘    要:介绍基于双PSD实现大长度宽范围直线导轨俯仰角、偏摆角以及空间二维直线度等四个自由度在线测量的新型方法,对其测量原理进行了分析和验证,并建立求取长直导轨俯仰角、偏摆角的数学模型和基于激光空间偏角修正基础上的二维直线度的数学模型;讨论影响测量过程的各种因素,提出消除其影响所应采取的措施。

关 键 词:PSD  导轨  俯仰角  偏摆角  直线度

New Method Based on PSD to Measure Four Degree of Freedom of Long Linear Guide Rails
Song Qing;Wang Hongping;Liu Changqing. New Method Based on PSD to Measure Four Degree of Freedom of Long Linear Guide Rails[J]. Tool Engineering(The Magazine for Cutting & Measuring Engineering), 2014, 0(3): 86-89
Authors:Song Qing  Wang Hongping  Liu Changqing
Affiliation:Song Qing;Wang Hongping;Liu Changqing;
Abstract:A method based on position sensitive detector (PSD) to measure the ditch and yaw error and straightness error of long linear guide rails simultaneously is introduced. The measurement principle is analyzed and validated. The mathematical model of the ditch and yaw angle as well as straightness error after correction of laser space angle are built. The various factors that affect the measurement process are discussed and some measures are taken to eliminate the influence.
Keywords:position sensitive detector (PSD)  guide  ditch angle  yaw angle  straightness error
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