基于微机电系统的数字检波器及其应用

介绍了基于微机电系统（MEMS）的数字检波器性能，并将其与模拟检波器进行了对比分析。MEMS数字检波器的振幅和频率响应较为理想，动态范围宽，且体积小，重量轻，采用全数字传送；而模拟检波器由于是采用组合方式来压制环境噪声和相干噪声，因此使得高频信号损失，分辨率下降，且体积大，埋置和收放困难，工效低。通过对常规10Hz检波器和MEMS数字检波器的振幅响应、相位响应、谐波畸变的对比，讨论了数字检波器的优越性。在中原油田进行了数字检波器（单个）和模拟检波器（12个组合）的野外采集试验，结果表明，MEMS数字检波器采集的记录在浅层有较高的分辨率。最后介绍了国内MEMS数字检波器的研制现状。

Performance and application of digital geophones based on MEMS

The advent of MEMS-based digital sensors has been improved as the next great advance in land seismic acquisition, like the shift to 24-bits recording systems ten years ago. Comparing normal geophones with the digital geo-phone contains the benefits of a broadband linear amplitude and phase response, wider dynamic range, smaller bulk and mass, and the full digital transmission, and is a kind of perfect three-component geophone. The paper presented the performance of digital geophone firstly, and then comparing results collected on field by digital and coiled geophones separately were given. Finally, the fabrication of digital geophone in the domestic market is discussed briefly.