| 精密气动定位系统的发展及应用 |
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| 引用本文： | 袁文全,巩岩. 精密气动定位系统的发展及应用[J]. 光机电信息, 2011, 0(8): 37-44 |
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| 作者姓名： | 袁文全 巩岩 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室; |
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| 基金项目： | 国家02专项基金(2009ZX02005)资助 |
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| 摘 要： | 精密气动定位系统具有高精度、高速、大行程、传动平稳、使用费用低等优点,目前广泛地应用于光刻、数控机床等诸多精密工程领域.本文按照时间顺序介绍了精密气动定位系统的发展情况,总结了精密气动定位系统的应用特点,并指出当前精密气动定位系统一些有待改进的关键技术.
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| 关 键 词： | 气动 精密定位 非线性 气驱动器 |
Progress and Applications of High -performance Pneumatic Positioning System |
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| YUAN Wen-quan,GONG Yan. Progress and Applications of High -performance Pneumatic Positioning System[J]. OME Information, 2011, 0(8): 37-44 |
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| Authors: | YUAN Wen-quan GONG Yan |
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| Affiliation: | YUAN Wen-quan,GONG Yan(State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China) |
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| Abstract: | High-performance pneumatic positioning system has such advantages as high-precision,high speed,large stroke,smooth transmition,cost-effectiveness and so on,and it is widely applied to precision engineering such as photolithography,CNC,etc at present.The progress of high-performance pneumatic positioning system was described in chronological order,the applications and key technologies were summarized. |
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| Keywords: | pneumatic high-precision positioning nonlinearity pneumatic actuators |
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