| MEMS压阻式超声传感器阵列的设计与测试 |
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| 引用本文： | 廉德钦,何常德,张慧,于佳琪,宛克敬,薛晨阳.MEMS压阻式超声传感器阵列的设计与测试[J].半导体学报,2013,34(3):034007-7. |
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| 作者姓名： | 廉德钦 何常德 张慧 于佳琪 宛克敬 薛晨阳 |
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| 作者单位： | Key Laboratory of Instrumentation Science&Dynamic Measurement,Ministry of Education,North University of China;Key Laboratory of Science and Technology on Electronic Test&Measurement,North University of China;Key Laboratory of Science and Technology on Electronic Test & Measurement,North University of China |
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| 基金项目： | 国家863计划资助项目(2011AA040404);国家自然科学基金资助项目(61127008) |
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| 摘 要： | The design,fabrication and packaging of a type of MEMS piezoresistive ultrasonic transducer array are introduced.The consistency of the resonance frequency and the sensitivity of the array are tested.Moreover,we detect the directivity and the multi-target identification ability of the array.The results of the consistency of the resonance frequency and the sensitivity show that there is a gap between the practical and theoretical results.This paper analyzes this problem in detail and points out the direction of improvement.As for the directivity,the actual result is consistent with the theoretical one.The results of multiple target distinguishing tests demonstrate that the smallest resolution angle of the array is 5.72°when the distance between the sensor array and measured objects is 2 m.
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| 关 键 词： | ultrasonic sensor piezoresistive integrated array multi-target identification |
The design and test of MEMS piezoresistive ultrasonic sensor arrays |
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| Lian Deqin,He Changde,Zhang Hui,Yu Jiaqi,Yuan Kejing and Xue Chenyang.The design and test of MEMS piezoresistive ultrasonic sensor arrays[J].Chinese Journal of Semiconductors,2013,34(3):034007-7. |
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| Authors: | Lian Deqin He Changde Zhang Hui Yu Jiaqi Yuan Kejing and Xue Chenyang |
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| Affiliation: | Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China;Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China;Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China;Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China;Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China;Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China;Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China;Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China;Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China |
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| Abstract: | The design, fabrication and packaging of a type of MEMS piezoresistive ultrasonic transducer array are introduced. The consistency of the resonance frequency and the sensitivity of the array are tested. Moreover, we detect the directivity and the multi-target identification ability of the array. The results of the consistency of the resonance frequency and the sensitivity show that there is a gap between the practical and theoretical results. This paper analyzes this problem in detail and points out the direction of improvement. As for the directivity, the actual result is consistent with the theoretical one. The results of multiple target distinguishing tests demonstrate that the smallest resolution angle of the array is 5.72° when the distance between the sensor array and measured objects is 2 m. |
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| Keywords: | ultrasonic sensor piezoresistive integrated array multi-target identification |
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