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| 电子工艺 | |
| 摘 要： | Y2000-62067-380 0014469紫外光刻技术:用于微系统技术的有前途、低成本的另一种方式=UV-LIGA:a promising and low-cost variantfor microsystem technology[会,英]/Qu,W.& Wen-zel,C.//1998 IEEE International Conference on Opto-electronic and Microelectronic Materials and Devices.—380～383(EC)Y2000-62237-47 0014470互连模拟和信号综合性问题(2)=Session WP3:inter- |
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