| 微传感器表面温度非接触测试及In2O3微传感器气敏特性的研究 |
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| 引用本文： | 马晓康,丛慧,穆仁,范会涛,杨卉,祈明锋,张小水,张彤. 微传感器表面温度非接触测试及In2O3微传感器气敏特性的研究[J]. 传感技术学报, 2011, 24(12): 1668-1671 |
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| 作者姓名： | 马晓康 丛慧 穆仁 范会涛 杨卉 祈明锋 张小水 张彤 |
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| 作者单位： | 吉林大学电子科学与工程学院集成光电子学国家重点联合实验室;河南汉威电子股份有限公司 |
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| 基金项目： | 国家自然科学基金项目(51102109) |
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| 摘 要： | 基于“相同温度下同一物体所产生的辐射功率相同”这一原理,搭建了一套非接触式微小芯片表面工作温度的测试平台.利用该平台对汉威电子出品的一种平面陶瓷基微气体传感器衬底的表面工作温度进行了测试,明确了其表面温度与加热电流之间的关系及芯片表面工作温度分布图.在此基础上,确定了In2 O3纳米纤维的最佳工作温度,研究了最佳工作温...
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| 关 键 词： | 微气体传感器 非接触测温 热辐射 温度分布 三氧化二铟 |
The Research of Non-contact SurfaceTemperature Test and Sensitive Properties of In2O3 Micro Sensors |
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| MA Xiaokang,CONG Hui,MU Ren,FAN Huitao,YANG Hui,QI Mingfeng,ZHANG Xiaoshui,ZHANG Tong. The Research of Non-contact SurfaceTemperature Test and Sensitive Properties of In2O3 Micro Sensors[J]. Journal of Transduction Technology, 2011, 24(12): 1668-1671 |
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| Authors: | MA Xiaokang CONG Hui MU Ren FAN Huitao YANG Hui QI Mingfeng ZHANG Xiaoshui ZHANG Tong |
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| Affiliation: | 1,2 1.State Key Laboratory On Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun 130012,China;2.Henan Hanwei Electronics Co.,Ltd.,Zhengzhou 450001,China |
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| Abstract: | A non-contact temperature measurement platform was introduced to measure operating temperature of tiny chips according to the theory about the same radiated power for a certain object at the same temperature.On this platform,the relationship between surface temperature and operating current and temperature contours of a micro planar-ceramic sensor(Hanwei Electronics Co.,Ltd.)was defined.On this base,the optimum operating temperature of In2O3 nanofibers was determined.The sensitive properties of In2O3 sensor were studied at this optimum operating temperature to verify the validity of the temperature measurement system.This method can further extend to the surface temperature measurement of other micro-structure or MEMS devices. |
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| Keywords: | micro gas sensor uncontact temperature measurement Infrared radiation temperature distribution In2O3 |
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