| Deposition of chromium aluminum nitride coatings by arc ion plating |
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| 引用本文： | 张淑娟 李明升 冯长杰 刘庭芝 多树旺. Deposition of chromium aluminum nitride coatings by arc ion plating[J]. 中国有色金属学会会刊, 2007, 17(A02): 780-784 |
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| 作者姓名： | 张淑娟 李明升 冯长杰 刘庭芝 多树旺 |
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| 作者单位： | [1]Jiangxi Key Laboratory of Surface Engineering, Jiangxi Science and Technology Normal University, Nanchang 330013, China [2]Department of Materials Science and Engineering, Nanchang Institute of Aeronautical Technology, Nanchang 330063, China |
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| 基金项目： | Project（50401022） supported by the National Natural Science Foundation of China; Project（0650034） supported by the Natural Science Foundation of Jiangxi Province, China |
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| 摘 要： | Cr-Al-N ternary coatings were deposited by arc ion plating method using isolated Cr target and Al target. The influence of AlN content on the phase change was studied by synthesizing Cr1-xAlxN coatings with different x values. The effects of substrate negative bias on the surface morphology, deposition rate and phase structure were investigated. As the aluminum content increases, the structure of （Cr1-xAlx）N changes from Bl（NaCl） phase to B4（wurtzite） phase. The critical content of A1N solubilized in B 1 （NaCl） lattice is close to 0.7. With the increasing pulse negative bias, the deposition rate decreases constantly, the droplet contamination is more serious, the ion-etching effect on coating surface is more obvious, and the change of preferred orientation and the shift of XRD peak take place.
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| 关 键 词： | 铬铝氮涂层 电弧离子电镀法 电沉积 相变 |
| 收稿时间： | 2007-07-15 |
| 修稿时间： | 2007-09-10 |
Deposition of chromium aluminum nitride coatings by arc ion plating |
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| ZHANG Shu-juan, LI Ming-sheng , FENG Chang-jie, LIU Ting-zhi, DUO Shu-wang. Deposition of chromium aluminum nitride coatings by arc ion plating[J]. Transactions of Nonferrous Metals Society of China, 2007, 17(A02): 780-784 |
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| Authors: | ZHANG Shu-juan LI Ming-sheng FENG Chang-jie LIU Ting-zhi DUO Shu-wang |
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| Abstract: | |
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| Keywords: | chromium aluminum nitride arc ion plating phase change pulse bias |
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