| 低损耗玻璃光波导的溶胶-凝胶法制备 |
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| 引用本文： | 侯占佳,陶曲明,刘丽英,徐雷,王文澄,李富铭.低损耗玻璃光波导的溶胶-凝胶法制备[J].中国激光,1999,26(3):253-256. |
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| 作者姓名： | 侯占佳 陶曲明 刘丽英 徐雷 王文澄 李富铭 |
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| 作者单位： | 复旦大学物理系三束材料改性国家重点实验室 |
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| 摘 要： | 采用溶胶－凝胶（Ｓｏｌ－ｇｅｌ）技术制备了ＳｉＯ２－ＴｉＯ２低损耗平面光波导，在６３３ｎｍ处的传输损耗为０．５７ｄＢ／ｃｍ。同时在硅基板上制备了脊型Ｙ形波导分束器，分束比为１１。
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| 关 键 词： | 平面光波导，Y形分束器，溶胶－凝胶技术 |
| 收稿时间： | 1997/11/3 |
Fabrication of Low loss Silica on Silicon Waveguides with Sol gel Techniques |
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| Hou Zhanjia,Tao Quming,Liu Liying,Xu Lei,Wang Wencheng,Li Fuming.Fabrication of Low loss Silica on Silicon Waveguides with Sol gel Techniques[J].Chinese Journal of Lasers,1999,26(3):253-256. |
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| Authors: | Hou Zhanjia Tao Quming Liu Liying Xu Lei Wang Wencheng Li Fuming |
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| Abstract: | Low loss SiO2 TiO2 waveguides were fabricated with sol gel techniques. Propagation loss of 0.57 dB/cm was obtained at 633 nm. A Y branch channel beam splitter was also fabricated on a Si substrate. The branch ratio is approximately 1∶1. |
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| Keywords: | waveguides Y branch splitter sol gel techniques |
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